Factories began to replace running streams as a source of power for running machines with:

Steam and coal

Explanation:

Before the advent of the Industrial Revolution, running streams were an important source of power for machines. This was important for a great variety of industries. However, as industries developed further, more efficient ways of producing energy were discovered. Steam and coal became two important sources of energy, but also important pollutants in our environment.

Factories began to replace running streams as a source of power for running machines with: steam and coal